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Part Number OEM Part Description
E17063240 0 VAPOURIZER POLISHING (E17063240) rework
1101982.1 Akrion 200mm chuck, OUTER RING ONLY
210761-001 / 210762-001 Akrion 50-wafer carrier with teflon rod & quartz end plates for Akrion Wet bench (with black teflon coating on quartz), CARR QTZ SER3 200mm PFA C
N10-EC-E-S2-SL1-M2O Akrion SCP Controller: Model: MWTX-8-MNET OPTS: N10-EC-E-S2-SL1-M2O
121-A-O/B-22-NB/10 Akrion SCP motor ASM121-A-O/B-22-NB/10
81-A-O/B-00-NB/10 Akrion SCP Motor: ASM81-A-O/B-00-NB/10
81-B-O/B-00-NB/10 Akrion SCP Motor: ASM81-B-O/B-00-NB/10
A220-200C50 / A220-80S Akrion/SCP SCP 9400 50-wafer full-teflon carrier
STPC-8134 Akrion/Steag Steag Pusher head metal base with plastic comb assembly, min order qty = 4 pcs)
0040-96353 AMAT Gas line for AMAT implanter, design A
0040-96353 AMAT Gas line for AMAT implanter, design B
0040-09700 AMAT P200 ASSY BELLOWS LOWER
0010-70271 AMAT P200 ASSY 101 WAFER LIFT
0040-18078 AMAT P200 BELLOW WELDMENT HDP-CVD
0040-75904 AMAT P200 BELLOWS WAFER ORIENTER
0190-00958 AMAT P200 BRG 4PT CONT 8.625OD 8ID .3125W W/CA
3700-02352 AMAT P200 CHAMBER ORING 15.955X .139 CHEMRAZ
3920-01671 AMAT P200 Cleaner brush 3920-01671 SCRUBBER MESA
0200-18081 AMAT P200 COVER LOW PROFILE HDP-CVD ULTIMA
0021-16908 AMAT P200 DAMPING GASKET (Blue O-ring between RR t
0020-79222 AMAT P200 DIAPHRAGM SEAL
0200-10446 AMAT P200 INSERT RING. 200MM NOTCH(2)
0200-10073 AMAT P200 INSULATOR QUARTZ 200MM SIMPLE CATHODE (E
0020-93901 AMAT P200 MEMBRANE, SILICONE, 8.00 TITAN HEAD
3700-02984 AMAT P200 O-RING 2-012 CHEMRAZ SC513 80
3700-01823 AMAT P200 O-RING 2-108 CHEMRAZ SC513 80
3700-02329 AMAT P200 O-RING 2-109 CHEMRAZ 90 DURO W
3700-01534 AMAT P200 O-RING 2-111 CHEMRAZ SC513 80
3700-01035 AMAT P200 O-RING 2-111 VITON 75DURO BLACK
3700-02211 AMAT P200 O-RING 2-115 CHEMRAZ SC51380D
3700-02678 AMAT P200 O-RING 2-117 CHEMRAZ SS513 80D
3700-01032 AMAT P200 O-RING 2-118 VITON 75 DURO BLACK
3700-02137 AMAT P200 O-RING 2-119 CHEMRAZ SC513 80
3700-01863 AMAT P200 O-RING 2-124 VITON 75DURO BLK
3700-02154 AMAT P200 O-RING 2-208 CHEMRAZ SC 513 80
3700-02396 AMAT P200 O-RING 2-217 CHEMRAZ SC513 80
3700-01527 AMAT P200 O-RING 2-256 CHEMRAZ SC513 80
3700-02262 AMAT P200 O-RING 2-257 4079 KALREZ BLACK
3700-02447 AMAT P200 O-RING 2-276 VITON 75 DURO B
3700-01415 AMAT P200 O-RING 2-374 SILICONE 70DURO
3700-02187 AMAT P200 O-RING CHEMRAZ 2-122 SC51380
3700-01719 AMAT P200 O-RING CHEMRAZ 2-246 CP51380
3700-02443 AMAT P200 ORING 2-109 VITON 75DURO BLACK
3700-01723 AMAT P200 ORING 2-120 CHEMRAZ SC513 80
3700-02719 AMAT P200 ORING 2-224 VITON 75DURO BROWN
3700-01595 AMAT P200 ORING -2-282- SILICONE 70DURO
3700-01710 AMAT P200 ORING 2-011 CHEMRAZ SC513 80
3700-01690 AMAT P200 ORING 2-220 KALREZ 2037 80D
3700-01030 AMAT P200 ORING ID .070 CSD .070 VITON 75DURO BLK
3700-01756 AMAT P200 ORING ID .234 CSD .139 CHEMRAZ SC513 80
3700-02028 AMAT P200 ORING ID .301 CSD .070 VITON 75DURO BRN
3700-01620 AMAT P200 ORING ID .424 CSD .103 .625 OD SILICON
3700-01578 AMAT P200 ORING ID .484 CS .139 KALREZ 4079 75DURO
3700-01036 AMAT P200 ORING ID .487 CSD .103 VITON 75DURO BLK
3700-01824 AMAT P200 ORING ID .489 CSD .070 VITON 75DURO BLK
3700-01852 AMAT P200 ORING ID .549 CSD .103 VITON 75DURO BLK
3700-01040 AMAT P200 ORING ID 1.109 CSD .139 VITON 75DURO BLK
3700-01372 AMAT P200 ORING ID 1.421 CSD .139 VITON 75DURO BRN
3700-01593 AMAT P200 ORING ID 1.734 CSD .139 SILICONE 70DURO
3700-02411 AMAT P200 ORING ID 11.484 CSD .139 VITON 75 DURO B
3700-01887 AMAT P200 ORING ID 13.820CSD .139 VITON
3700-01642 AMAT P200 ORING ID 13.984 CSD .139 VITON 75DURO BL
3700-01503 AMAT P200 ORING ID 13.984 CSD .139 VITON 75DURO BR
3700-02365 AMAT P200 ORING ID 14.975 CSD .210 CHEMRAZ SS592
3700-01802 AMAT P200 ORING ID 2.175 CSD .103 KALREZ 4079 75DU
3700-02303 AMAT P200 ORING ID 2.175 CSD .103 VITON
3700-01929 AMAT P200 ORING ID 2.987 CSD .103 KALREZ-4079 75DU
3700-02437 AMAT P200 ORING ID 2.987 CSD .103 VITON 75DURO BLK
3700-01371 AMAT P200 ORING ID 4.359 CSD .139 VITON 75 DURO BL
3700-01398 AMAT P200 ORING ID 5.109 CSD .139 VITON 75DURO BLK
3700-01073 AMAT P200 ORING ID 5.984 CSD .139 VITON DURO 75 BR
3700-01056 AMAT P200 ORING ID 7.734 CSD .139 VITON 75DURO BLK
3700-02323 AMAT P200 ORING ID 8.734 CSD .139 CHEMRAZ 80 DURO
3700-01429 AMAT P200 ORING ID 8.75 CSD .139 VITON 75 DURO
3700-02327 AMAT P200 ORING ID 9.734 CSD .139 CHEMRAZ 80 DURO
3700-02153 AMAT P200 ORING ID546 CSD 1
3700-03205 AMAT P200 ORING VTEX GATE VALVE OD 10.375 KALREZ
3700-01217 AMAT P200 ORING-2-108-VITON 75DURO BLK
0200-35486 AMAT P200 PIN LIFT (QUARTZ) MOD II
0200-00353 AMAT P200 PIN SPACER WXZ+
0200-35222 AMAT P200 QUARTZ WINDOW ORING
30030-M13-10812 AMAT P200 RETAINING RING
0200-00622 AMAT P200 RING OUTER 200mm WXZ+ NCSR
0200-10377 AMAT P200 RING SINGLE 195MM SEMI NT CER DPS CHMB
0020-18294 AMAT P200 SCREW MODIFIED 1/4-20X .37
0021-77542 AMAT P200 SUPPORT PAD AIR TRAP 8.00 TITAN HEAD
0020-18899 AMAT P200 WASHER NOZZLE ULTIMA HDPCVD
0040-32053 AMAT P200 WELDMENT BELLOW WAFER LIFT
0200-35292 AMAT P200 WINDOW ENDPOINT DPS(QUARTZ)
A95-214-01 ASH01301 HALOGEN-DUAL (BURN IN)
A06-301-01 ASH01301 QUARTZ WINDOW, 10 IN
A06-300-01 ASH01301 QUARTZ WINDOW, 9 1/2 IN
3200-1000-09 Asyst ARM CONTROL BOARD
9700-2815-01 Asyst ARM MOTOR-P10
9700-2815-02 Asyst ARM MOTOR-P9
7500-1084-0X Asyst BEARING
6900-1272-01 Asyst COUPLEY AMPLIFIER(BL)
6900-1563-01 Asyst COUPLEY AMPLIFIER(GOLD)
9700-2764-0X Asyst DRIVE ASSEMBLY
9700-4317-01 Asyst ELEVATER MOTOR FOR LPT-2200
9700-3262-02 Asyst ELEVATER UP/DOWN LIMIT SENSOR
9700-7024-0X Asyst INX LEAD SCREW
9701-1083-04 Asyst INX-2200 BOARD
9700-7972-01 Asyst INX-ELEV. MOTOR
9700-4303-01 Asyst LASER BRACKET
9700-4834-02 Asyst LASER DIODE
9700-3265-01 Asyst LATCH AND SEATER SENSOR
9700-9009-01 Asyst LPT index board
9700-4091-01 Asyst MINI I/O FOR LPT 2200
9700-3263-01 Asyst POD LATCH MOTOR
9700-4749-01 Asyst POD LOCK MOTOR
9700-3268-01 Asyst POD LOCK WIRE
3000-1018-01 Asyst POWER SUPPLY FOR ALU
6200-2006-01 Asyst POWER SUPPLY FOR ARM-2200
9700-3264-01 Asyst SEATER MOTOR
6900-1456-01 Asyst SERVO AMPLIFIER FOR LPT-2200
9700-6464-02 Asyst SERVO MOTION BOARD
9700-1134-01 Asyst SMIF ENCODER
9700-2140-01 Asyst SWITCH PANEL FOR ARM-2200
7500-1043-01 Asyst TILT MOTOR BELT
CT2980-093289-11 CLEAN TRACKS(404) LAMP FOR WEE UNIT New Type
CT027-101476-1 CLEAN TRACKS(404) O-RING..KALREZ4079 AS568A-015 BLK
CT027-101896-1 CLEAN TRACKS(404) O-RING..KALREZ4079 AS568A-039 BLK
10261133 CMP Tools CR IC1000-A2,050", K1/3/SP2310, 20", II
10371891 CMP Tools IC1000-IW2, 050",XY/3/SP2310, 20", II
3700-01327 CVD/ETCH AMTP5000 O-RING 2-024 VITON (WF6)
3700-01223 CVD/ETCH AMTP5000 O-RING CHAMBER BOTTOM (SPT).
3700-01095 CVD/ETCH AMTP5000 O-RING GAS FEED REPLACED
3700-01259 CVD/ETCH AMTP5000 O-RING L.L. ROUGH VALVE POPPET
3700-01796 CVD/ETCH AMTP5000 O-RING .424ID .103CSD (WB) (BW) KALREZ
3700-01094 CVD/ETCH AMTP5000 ORING ID .362 CSD .103 VITON 75DURO BLK
3700-01258 CVD/ETCH AMTP5000 ORING ID 1.989 CSD .070 VITON 75DURO BLK
0200-09450 CVD/ETCH AMTP5000 QUARTZ TUBE (WF6) CONSTANT VOLTAGE GRADI
3000527 EATON, NV-10, IMP2/4 CRTG ULTRA-PURE DO-808 SSYBRON
17033160 EATON, NV-10, IMP2/4 GRAPHITE FOR SOURCE
3500097 EATON, NV-10, IMP2/4 O-RING NBR 2-369
3500072 EATON, NV-10, IMP2/4 O-RING -208 BUNA
3500028 EATON, NV-10, IMP2/4 O-RING -364 BUNA
3500076 EATON, NV-10, IMP2/4 O-RING BUNA 010
3500074 EATON, NV-10, IMP2/4 O-RING BUNA 374
6000065 EATON, NV-10, IMP2/4 POT 2KOM 10D BDUR 3540-S-1
17032980 EATON, NV-10, IMP2/4 SOURCE GAS FEED TUBE IMP4
5000132 EATON, NV-10, IMP2/4 STDF 3/8LX3/8X6-32 RND CER HHS
Q10WFSI(01)-AA FSI FSI DIW quartz heater, 1-piece module of metal casing unit
027-003364-1 FURNACES 100 O-RING KALREZ8475 P-6 WHITE
027-003071-1 FURNACES 100 O-RING..KALREZ8475 AS568A-222
027-100976-1 FURNACES 100 O-RING..VITON AS568-110 BLK
027-101035-1 FURNACES 100 O-RING..VITON AS568-382 BLK
027-000186-1 FURNACES 100 O-RING..VITON G-280 BLK
027-001383-1 FURNACES 100 O-RING..VITON V-20 BLK
027-001382-1 FURNACES 100 O-RING..VITON V-335 BLK
A78-071-01 Gasonic-Asher O-Ring ,Silicone, LL Chamber To Ferroflu
A78-063-01 Gasonic-Asher O-Ring Slicone, loadlock Chamber Top Cov
A78-094-01 Gasonic-Asher O-Ring, Chemraz, 515 (White), Valve Main
A78-095-01 Gasonic-Asher O-Ring, Chemraz, 515 (White), Valve Main
A78-080-06 Gasonic-Asher O-Ring, Chemraz, 550 (Black), PC Door Se
A78-073-01 Gasonic-Asher O-Ring, Silicone, Atmosphere Door Seal
A78-014-01 Gasonic-Asher O-Ring, Silicone, EOP Housing to PC Cham
A78-016-01 Gasonic-Asher O-Ring, Silicone, EOP, Inner Window
A78-021-01 Gasonic-Asher O-Ring, Silicone, Gas Cap Adaptor, upper
A78-085-01 Gasonic-Asher O-Ring, Silicone, LL Chamber to LL Lifte
A78-303-01 Gasonic-Asher O-Ring, Silicone, PC Chamber Top & Bottom
A78-0104-01 Gasonic-Asher O-Ring, Silicone, PC/LL Chamber Interfac
A78-300-01 Gasonic-Asher O-Ring, Silicone, PC/LL Chamber Interface
A78-072-01 Gasonic-Asher O-Ring, Silicone, PC/LL Lifter Bellows,
A78-301-01 Gasonic-Asher O-Ring, Silicone, PC/LL Lifter Mounting
A78-090-01 Gasonic-Asher O-Ring, Silicone, Vacuum Arm Mount to LL
A78-036-01 Gasonic-Asher O-RING,CHEMRAZ, 9-010,(.239ID*.070W)
A78-034-01 Gasonic-Asher O-RING,CHEMRAZ, 9-120,(.987ID*.103W)
A78-024-01 Gasonic-Asher Oring, Conductive, Blue, Turning Rod
A06-012-02 Gasonic-Asher QUARTZ DIFFUSION DISK
A06-014-01 Gasonic-Asher QUARTZ SHOWER HEAD
2-326 GENERAL PARTS (1000) O-RING FOR KF40/NW40 VITON
17B5402 IMP7-GSD HEmc1900 ASSY FEED THRU SEN-EM
4400017 IMP7-GSD HEmc1900 CLAMP RING 1/4 - 20 SCREW
3500174 IMP7-GSD HEmc1900 O-RING -374 VITON
17125570 IMP7-GSD HEmc1900 PLATE FLD RPL - GROUND HE INA 57064
5001057 IMP7-GSD HEmc1900 QUADRUPOLE STDF ISO 5/8LX3/8 X 6-32 CER
17138740 IMP7-GSD HEmc1900 REAR SHIELD REFLECTOR GRAPHITE
E17033420 IMPLANTER 101 ANALYZER GRAPHITE EXIT LINER
E17026590 IMPLANTER 101 APERTURE DEFINING
E17045790 IMPLANTER 101 APERTURE POSTSCAN
E17063160 IMPLANTER 101 ARC CHAMBER END PLATE
E17036921 IMPLANTER 101 ARC CHMBER SIDE
E17106820 IMPLANTER 101 BEAM STOP NEUTRAL DUMP
E17016260 IMPLANTER 101 BEAMLINE ANALYZER GRAPHITE
E17063170 IMPLANTER 101 END PLATE R END PLATE
E19009080 IMPLANTER 101 FILAMENT BERNAS IMPROVED
E17123500 IMPLANTER 101 GATE FOCUS FARADAY
E17037010 IMPLANTER 101 INSULATOR FILA CLAMP
E17168272 IMPLANTER 101 INSULATOR FILAMENT INNER PHASE
E17036410 IMPLANTER 101 LINE GRAPHITE DIPOL
E17168280 IMPLANTER 101 NUT INSULATOR OUTER PHASE 3
E35000067 IMPLANTER 101 O-RING BUNA 3/8 ID
E35000192 IMPLANTER 101 O-RING VITON 0.237
E35000259 IMPLANTER 101 O-RING VITON 1.674
2542264 IMPLANTER 101 O-RING VITON 7.484 ID (2-169)
E17045252 IMPLANTER 101 PICK PAD
E17026680 IMPLANTER 101 PLATE GROUND GRAPHSCAN
E17061270 IMPLANTER 101 PLATE GROUND MIRROR
E17026530 IMPLANTER 101 PLATE MOUNTING
E17026690 IMPLANTER 101 PLATE REAR GROUND
E17026720 IMPLANTER 101 SCAN GROUND GRAPHSCAN
E17156050 IMPLANTER 101 SHEILD TRAVELLING FARADAY
E17037065 IMPLANTER 101 SHIELD ENTRANCE BUTTOM
E17183480 IMPLANTER 101 SHIELD INSULATING SUPPRESSION FEEDTHRU
E59000003 IMPLANTER 101 STANDOFF CERAMIC 3/8 L X 3/8 O
E59000002 IMPLANTER 101 STANDOFF CERAMIC 6-32X1/2
E59000010 IMPLANTER 101 STANDOFF CERAMIC INSULATOR 3/4
E17026540 IMPLANTER 101 SUPPRESSION ELECTROD.
1214980 IMPLANTER GSD EATON1 CONNECTOR ASSY MHV FEED-THRU - E. SHOWER
1185850 IMPLANTER GSD EATON1 DOMED SUPPORT PIN ASSY - UPGRADE (VACUUM
17135440 IMPLANTER GSD EATON1 ELECTRON SHOWER GRAPHITE LINER NEW TYPE
17230100 IMPLANTER GSD EATON1 ELS ARC SLIT T15 MOL. OLD TYPE
17142890 IMPLANTER GSD EATON1 ELS CATHODE MOLY
17121930 IMPLANTER GSD EATON1 ELS CATHODE REPELLER
17142660 IMPLANTER GSD EATON1 ELS HEAT SHIELD ELS
17189140 IMPLANTER GSD EATON1 ELS NUT PLATE MOLY
17121740 IMPLANTER GSD EATON1 ELS REPELLER
17121850 IMPLANTER GSD EATON1 ELS REPELLER INSULATOR 7/16
17033100 IMPLANTER GSD EATON1 ELS RETAINER
17121760 IMPLANTER GSD EATON1 ELS SET SCREW MOLYBDENUM
17128740 IMPLANTER GSD EATON1 ELS SHIELD CLAMP RING
17033150 IMPLANTER GSD EATON1 ELS SOCKET JOINT
17124410 IMPLANTER GSD EATON1 ELS SPACER RETAING ROD
17128230 IMPLANTER GSD EATON1 ELS SPACER SHOULDER SCREW
17033140 IMPLANTER GSD EATON1 ELS SPRING COMPRESSION
4001167 IMPLANTER GSD EATON1 ELS SPRING RETAINING ROD INCONEL
3300134 IMPLANTER GSD EATON1 GAUGE CONVECTRON W/FLNG 275203 GP.
17099661 IMPLANTER GSD EATON1 GRAPHITE OUTER BEAM DUMP VGI (ANALYZER M)
17099831 IMPLANTER GSD EATON1 GRAPHITE SHIELD FARADAY CUP (VT1) (BIG).
IMPLANTER GSD EATON1 O-RING VITON - 2-384.
3500041 IMPLANTER GSD EATON1 O-RING -373 BUNA
3500068 IMPLANTER GSD EATON1 O-RING BUNA - 012.
17133400 IMPLANTER GSD EATON1 RC CHAMBER MOLY
17192380 IMPLANTER GSD EATON1 SPACER INSULATOR
17099201 IMPLANTER GSD EATON1 STRIKE PLATE (VT1).
3300133 IMPLANTER GSD EATON1 TUBE TC W/KF16 6343/0.
17132290 IMPLANTER GSD EATON1 VAE GROUND INSERT VGI LBB GRAPHITE
4400004 implanters-axcelis10 4-40X3/8 S/H/C/S SST
17250340 implanters-axcelis10 APERTURE SELECTABLE VG
17165580 implanters-axcelis10 ARC SLIT 20R MOLY ELS/IAS
17242360 implanters-axcelis10 BASE GRAPHITE COVER
17242590 implanters-axcelis10 BEAM APERTURE DEFLECTOR VG
17208240 implanters-axcelis10 BEAM DEFINING APERTURE LENGTH
41S0115 implanters-axcelis10 BELT TIMING .2P .38W 40T
17287860 implanters-axcelis10 CATHODE MTG PLT
17234240 implanters-axcelis10 CLAMP ISOLATOR
17B5099 implanters-axcelis10 Conect tube
17065341 implanters-axcelis10 CUP SHIELD GRAPHITE
17098511 implanters-axcelis10 DEFINING APERTURE VHE
17254970 implanters-axcelis10 FEED THRU
17248060 implanters-axcelis10 FILAMENT BOTTOM RING
17248070 implanters-axcelis10 FILAMENT BOTTOM SUPPORT
1909360 implanters-axcelis10 FILAMENT ELECTRON SHOWER
17287850 implanters-axcelis10 FILAMENT ELS .040
17321470 implanters-axcelis10 FILAMENT INSULATOR E-SHOWER
17248090 implanters-axcelis10 FILAMENT LOCATING PLATE
17B5814 implanters-axcelis10 FILAMENT MTG SCREW
17263200 implanters-axcelis10 FILAMENT PEFII
17248080 implanters-axcelis10 FILAMENT SPACER
17335310 implanters-axcelis10 FILAMENTSTRAP SUPPORT
17242440 implanters-axcelis10 HEAT SHIELD GASKET
17253420 implanters-axcelis10 HEAT SHIELD GASKET 17253420
17174410 implanters-axcelis10 INSULATOR 17174410
17287870 implanters-axcelis10 INSULATOR CATHODE PLT
3500581 implanters-axcelis10 O-RING -358 VITON 3500581
17122890 implanters-axcelis10 OUTER EXIT SHIELD
17066871 implanters-axcelis10 PLT STRIKE FDAY VG
17192430 implanters-axcelis10 RING FIELD
17036440 implanters-axcelis10 ROD RTNG TA NV20-200
17122900 implanters-axcelis10 SHIELD EXIT (INNER)
17254980 implanters-axcelis10 SHIELD FEED-THRU
17254950 implanters-axcelis10 SHIELD INSULATOR 17254950
17250360 implanters-axcelis10 SHIELD SUPPORT VG SELECT APERTURE
17272300 implanters-axcelis10 SHIELD TOUBE SELECTABLE APERTURE
17135960 implanters-axcelis10 SHOWER TUBE LINER (SERRATED)
17249700 implanters-axcelis10 SHOWER TUBE RING PLASMA SHOWER
17192390 implanters-axcelis10 SPACER GROUND ELECTRODE
17255000 implanters-axcelis10 SPRING CONTACT SHORT
3300187 implanters-axcelis10 STABIL ION GAUGE
5001608 implanters-axcelis10 STAND-OFF 3/8 X 3/4 (see 551425720)
17192410 implanters-axcelis10 SUPPRESSION PLATE
CLH2044S Kaijo Nison inline quartz heater CLH2044S(AES)
100001675 LAM 44xx/45xx ETCHER O-RING KIT FOR VALVE 40.
4S652-004-1AN Nikon_Fab2 AF HALOGEN LAMP TYPE:NT12V100WL
SUV 2510 NIL Nikon_Fab2 LAMP HG LONG LIFE I14 SUV 2510 NIL
15-108307-00 Novellus CLAMP RF STRAP
15-108174-00 Novellus Cup, Screw Cover
0735-722028 Novellus EPDM Bladder Diaphragm
A95-214-01 Novellus HALOGEN-DUAL (BURN IN)
A78-034-01 Novellus O Ring, Chemraz, 505 (BLACK), Plasma Tube, bottom
A78-036-01 Novellus O Ring,Chemraz,505 (Black), Plasma Tube Top ,
A78-071-01 Novellus O-Ring ,Silicone, LL Chamber To Ferroflu
A78-063-01 Novellus O-Ring Slicone, loadlock Chamber Top Cov
22-00361-00 Novellus O-Ring, 31.12 X 0.275,Viton, Barrel
22-00656-00 Novellus O-Ring, 7.475 X 0.139, Kalrez (2-264), Viewport
22-00236-00 Novellus O-Ring, 7.475 X 0.275, Viton, TM - Barrel
A78-094-01 Novellus O-Ring, Chemraz, 515 (White), Valve Main
A78-095-01 Novellus O-Ring, Chemraz, 515 (White), Valve Main