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Part Number OEM Part Description Photo
FFU-378AC310 351-250sus AXCELIS AAF, AstroFan Fan Filter Unit
AstroCel II - 29H99E2T3V3 AXCELIS AAF, Clean Room Air Filter
1215D12H AXCELIS Conversion Devices Inc., Extraction HV Convertor (Good)
8115149G00 AXCELIS CTI-CRYOGENICS, Cryo Purge Valve Manifold
AXCELIS ES Cooling Water Flow Meter
PS/NV-20PN15 AXCELIS Glassman High Voltage Inc, Power Supply - 2
PS/NV-20PN15 AXCELIS Glassman High Voltage Inc, Power Supply -1
AXCELIS Ion Gauge Port
1190160 AXCELIS P Shower
PS/NV-20PN15 AXCELIS Power Supply - 3
AXCELIS Power Supply-1
MK 106-4DK.07.U AXCELIS Ziehl-Abegg, Fan and Fan Motor
STPH-2002C EDWARDS Edwards Turbo Controller
BAF 800 316L FUJIKIN Valve (Used) S/N:100101
853-370174-060 LAM
853-034254-060 LAM
833-370177-060 LAM
853-031559-001 LAM 10Torr Manometer (625A11TDE)
629A-14608 LAM 1Torr Manometer
CV05C-500 LAM Capacitor
853-034220-030 LAM Chamber EMO Cable
LAM 003 LAM Chiller Edwards TCU40/80
853-034175-060 LAM Chiller EMO
LAM DC Power Supply
796-091975-003 LAM Fast Actuation Valve (Heated)
Non LAM LAM Gasbox power
771-095389-001 LAM HPS Convectron
853-101502-001 LAM IEP (SD1024)
853-101502-001 LAM IEP (SD1024)
685-901534-001 LAM IEP Computer (MTC 1000)
685-901534-001 LAM IEP Computer (MTC 1000)
685-097073-600 LAM LAM UI
LAM LCD Monitor
LAM Light Tower
799-432039-001 LAM MTR5 Robot (001-1951-06 Rev C16)
797-094970-001 LAM N2 UPC (MKS)
853-370176-060 LAM Pump Controller Cable
LAM 001 LAM TCP9400 A4 DFM Chamber only
LAM 002 LAM TCP9400 Poly Chamber only
714-550456-001 LAM TM CDA Regulator
800-482268-001 LAM TM Gate Door Solenoids
853-492319-001 LAM TM MUX ASSEMBLY
833-491135-060 LAM TM to Gas box EMO
LAM TM/LL Misc Sensors
853-492477-030 LAM Transport Pump Signal
STP-A2203C LAM Turbo Pump
LAM 004 LAM Turbo Pump Controller Edwards STP-H2002C
LAM 005 LAM Turbo Pump Edwards STP-A2203C
799-550362-001 LAM Vacuum Casette Elevator (001-9010-03)
F64-90064 LAM VAT 64
796-098282-012 LAM VAT 65 (F65-60477/45)
F02-101978/9 LAM VAT Gate Door X 5pcs
713-095246-001 LAM VCE Door Quartz
LP2-25-AK-C0VS-F12 LAM VCE slow/fast pump valves
LAM VCE Vent/Purge Valves
626A13TBE MKS Baratron (Used) S/N:000700452
621C11TBFHD MKS Signal conditioner (Used) S/N:000000925
621C11TBFHD MKS Transducer (Used) S/N:000000925
2013194 SEZ 10" FILTER Housing, PFA
2000391 SEZ 10" FILTER Housing, PFA
2013194 SEZ 10" FILTER Housing, PVDF
2000391 SEZ 10" FILTER Housing, PVDF
2000771 SEZ 10-100cc water/min HEX city water flowmeter (33-SSV)
2325472-01 SEZ 12" SPM Lift-Excenter Pin V1.2, PCTFE
2323441-01 SEZ 12"5/6UC Pin
2323441-03 SEZ 12"5/6UC Pin (strengthened)
2323441-02 SEZ 12"5/6UC Pin (strengthened)
SEZ 150/200/200 pin chuck, 6" wafer in standard 8" sp203/223 process chamber
2016087 SEZ 17" 223/4200/304/323/4300 Touch screen
2014194 SEZ 2-Way Integra 1/4" NC valve
2007015 SEZ 2-Way Integra 3/4" NC valve, 202-60.01
2000934 SEZ 2-way manual valve, 1/2" NPT 201-33
2310247 SEZ 2-WAY VALVE NC 202/68INTEGRA 1/4
2322097 SEZ 2-way Valve NC, Furon 2AEINL-F1616NC
2308153 SEZ 200 SCCMMKS CO2 MFC, AES1179AX52CR1AVSPC1 / viton
2320756 SEZ 200mm 203/Inner ring version 1.00
2009021-01 SEZ 200mm chuck metal gear ring inside standard chuck, pair of springs included (brand new)
SEZ 200mm chuck outer ring PCTFE 200mm, Rotary Disc Top Chuck 200/200/200
SEZ 200mm chuck refurb kit, consist of 200mm chuck outer ring, center piece, distance ring, (chuck pins not included)
2005070 SEZ 200mm chuck spring
2311542-0X SEZ 200mm DV chuck NC-Chuck 200/200/200-BF
SEZ 200mm ECCENTRIC PIN, anti-static (ESD) material
SEZ 200mm eccentric pin, big post, no slit for N2 blow (toshiba)
SEZ 200mm eccentric pin, big post, no slit for N2 blow (toshiba)
SEZ 200mm process chamber assembly
SEZ 200mm standard pin chuck 200/200/200 24-hole center plate for uniform N2 flow
2301520-01 SEZ 200mm standard pin chuck 200/200/200 standard 2301520
2301520 SEZ 200mm std Chuck refurbish
2014243 SEZ 200mm std Chuck refurbish
SEZ 201 elevating unit
2000754 SEZ 2027700 Exhaust Ducting, 50x56mm, PTFE-lined inner & outer surface, SS ring with Red PVC coated
2009326 SEZ 203 Elevating unit THK module
853-114222-001 SEZ 203 PROCESS CHAMBER 8" V
SEZ 203 Touch screen with customization for Japanese DOS use, front-side of machine usage only
2010265 SEZ 203 UPPER shutter door magnetic piston cylinder, precision pneumatic linear drive with magnetic coupling
2003413 SEZ 203/ clamp, fixture process pot, holder
2320760 SEZ 203/223 Drain medium, chemical drain pipe
2320762 SEZ 203/223 Insert DI/N2/DIO3 version 1.00
2010778 SEZ 203/223 shutter door magnetic piston cylinder, precision pneumatic linear drive with magnetic coupling
2003426 SEZ 203/drain version 1.00
2320754 SEZ 203/Inner ring bottom version 1.00
2320753 SEZ 203/Insert inner rings version 1.00
SEZ 223/304/323 CDS CPU board
SEZ 2320765 process chamber chemical drain tube
2021208 SEZ 3 way valve AD83C12F
SEZ 3" 75mm chuck RST-100/101
2000773 SEZ 3-20 GPH HEX city water flowmeter (43-SSV)
2303655 SEZ 3-way Ball Valve GF 199.103.137
2010203 SEZ 3-WAY NOZZLE WITH SUCTION
2004458 SEZ 3/2 magnetic valve 24V DC, (AS)VJ314M-MOZ
2013687 SEZ 3/2 valve 1" flare
2022937 SEZ 3/2-way Valve FURONESUPM3F1212VI (3/4" flare)
2316968 SEZ 3/4" HEX coil 6-pack
2336317 SEZ 300mm chuck tension spring
2005502 SEZ 300mm chuck tension spring
2311030 (DV) SEZ 300mm DV Chuck,
SEZ 300mm ECCENTRIC PIN, anti-static (ESD) material
2322327-01 SEZ 300mm ECCENTRIC PIN, PCTFE material for amine-based chemistry
2008086-01 SEZ 300mm ECCENTRIC, PIN (Machine version), original SEZ box & package
2008086-01 SEZ 300mm ECCENTRIC, PINCHUCK300,Z=28
2305255-02 SEZ 300mm std chuck refurb kit, outer ring x1, inner center plate x1, spacer x1
SEZ 4" chuck, 100mm wafers, RST-101
2007265 SEZ 4200 Chuck spindle unit housing sealant oring
2013650 SEZ 4200 end effector AL VACUUM EE 6"-8" SMIF
2026862 SEZ 4200 end effector AL VACUUM EE 6"-8" SMIF
2013828 SEZ 4200 end effector AL VACUUM EE 6"-8" SMIF
2013649 SEZ 4200 end effector AL VACUUM EE 6"-8" SMIF for MCM243 top
2309003 SEZ 4300 chuck, New OEM SP4300 Waferlift Pin-Chuck, 300300300 V-Seal
2015163 SEZ 5 Port Solenoid valve
2012323 SEZ 5 Port Solenoid valve, aSY3160-5MOUD-C4(-X178-Q)
2012740 SEZ 5 Port Solenoid valve, aSY3160-5MOUD-C4(-X178-Q)
2013788 SEZ 5 Port Solenoid valve, aSY3160-5MOUD-C6(-X178-Q)
2016717 SEZ 5" 125mm standard pin chuck 125/150/125 (Version 1.0)
2007005 SEZ 5" CHUCK
2019510 SEZ 5" wafer Bernoulli ECO gripper arm with gripper pins=5.5 or 6.5 mm
2016351 SEZ 6" wafer Bernoulli ECO gripper arm with gripper pins=7mm
2013046 SEZ 8" ECO gripper (entire assembly)
2019415 SEZ 8" ECO gripper (entire assembly), refurbished unit
2013046 SEZ 8" ECO gripper (entire assembly), refurbished unit
2008306 SEZ 8" ECO gripper (entire assembly), refurbished unit
2016350 SEZ 8" wafer Bernoulli ECO gripper arm with gripper pins=7mm,
2358503 SEZ AC motor servo driver
2008936 SEZ AC motor servo driver
2008936 SEZ AC servo amplifier unit for chuck motor 750w
2002012 SEZ AD 8 TTZ-S1REPAIR KIT ALMATEC
2328603-00 SEZ Adapter plate for Julabo Heater, 230V, 3.1 KW
2000627 SEZ ADAPTOR FOR DYNAPAR ENCODER
2002800 SEZ ADJUSTING DISK BRAKE
2002800 SEZ Adjusting disk brake, elevating unit
SEZ AESCTFV01TPE FILTER, pre-WET CARTRIDGE, 0.1UM, 10"
2014254 SEZ Air Cylinder
2000554 SEZ Air throttle needle valve
2010174 SEZ AL End effector (single sided) - AL VACUUM END-EFFECTOR 8" SMIF RST-202-04-02E SEZ-0240-PART-0107
2010704 SEZ AL End effector (single sided) - AL VACUUM END-EFFECTOR 8" SMIF RST-202-04-02E SEZ-0240-PART-0107
2007777 SEZ Al Endeff. Vac. 6"8" SMIF / 12" Std
2011035 SEZ Al Endeff. Vac. 6"8" SMIF / 12" Std.
2013744 SEZ AL FLIP (double sided) end effector SMIF 6"-8" ASSEMBLY SEZ-0240-MODU-0043 SEZ-0240-PART-0206
2013667 SEZ AL FLIP (double sided) end effector SMIF 6"-8" ASSEMBLY SEZ-0240-MODU-0043 SEZ-0240-PART-0206
2014332 SEZ AL FLIP END EFFECTOR 6"-8" STANDARD ASSEMBLY
2014341 SEZ AL FLIP END EFFECTOR 6"-8" STANDARD ASSEMBLY
2016338 SEZ AL FLIP END EFFECTOR 8"-12" STANDARD ASS
2016335 SEZ AL FLIP END EFFECTOR 8"-12" STANDARD ASS SEZ-0240-MODU-0004 SEZ-0240-PART-0011
2015633 SEZ AL VACUUM END-EFFECTOR 6" STANDARD ASSEM
2015635 SEZ AL VACUUM END-EFFECTOR 6" STANDARD ASSEM
2007729 SEZ Aluminum End Effector (1-Sided) non-smif / shutter door machine, 6"/8"/12"
2010702 SEZ Aluminum End Effector (1-Sided) non-smif / shutter door machine, 6"/8"/12"
2012273 SEZ Amplifier capacitive sensor 04003, bernoulli End Effector
2358501 SEZ Amplifier Servo 750W OMRON A-R88D-UA20V-NEW
2009016 SEZ Amplifier Servo 750W OMRON A-R88D-UA20V-NEW
SEZ Amplifier servo controlller for sigma-5 motion
2002470 SEZ ANGLE F.OPT.SENSOR SECTOR DISC
2009269 SEZ Angular Contact Ball Bearing
2010927 SEZ APERTURE PLATE FOR PROCESS CHAMBER 8" VE, SEZ-0320-PART-0214
2308194 SEZ Assembly - Glass sheet for Shutter, PGV
2001412 SEZ Assembly - Glass sheet for Shutter, PGV, with special fragile shipping packaging
2017999 SEZ Assembly - Glass sheet for Shutter, PGV, with special fragile shipping packaging
2001412 SEZ Assembly - Glass sheet for Shutter, PGV, with special fragile shipping packaging
2308194 SEZ Assembly - Glass sheet for Shutter, PGV, with special fragile shipping packaging
2011278 SEZ Assembly - Glass sheet for Shutter, PGV, with special fragile shipping packaging
2011277 SEZ Assembly - Glass sheet for Shutter, PGV, with special fragile shipping packaging PGV
2311033-00 SEZ Assembly rotary disc 300 NC-Chuck-BF
2319499-00 SEZ Assy,Motor,V-drive, isoport 9700-9102-01
SEZ ATM-407 robot tension timing belt LOW ARM 295MXL050, W-12.7_P-MXL_T-295, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt R,144MXL050, W-12.7_P-MXL_T-144, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt R1,102MXL037, W-9.5_ P-MXL_T-102, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt R3,144MXL050, W-12.7_P-MXL_T-144, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt T1,190XL050, W-12.7_P-XL_T-190, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt T3/R2/T2,130MXL050, W-12.7_P-MXL_T-130, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt T4,122MXL037, W-9.5_P-MXL_T-120, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt UP ARM,265MXL037, W-9.5_P-MXL_T-265, PU c/w Kevlar
SEZ ATM-407 robot tension timing belt Z,195MXL037, W-9.5_P-MXL_T-195, PU c/w Kevlar
2331502 SEZ ATMI Electrode cable
2331454 SEZ ATMI ISE AMP
2001635 SEZ BALL SCREW NUT SROLSHBO-10X3
2003716 SEZ Ball screw with flange nut, ball screw only, sp201 backside handling - up/down position
2003150 SEZ BASE 200/200/200 Pin Chuck
2003024 SEZ Base Block Brake
SEZ Battery unit PS-BP-5C
2002170 SEZ Bearing A chuck spindle unit (bearing unit), Stainless steel material
2014245 SEZ BEARING BUSH - 2ND UPDATE
2009103 SEZ Bearing cover, elevating unit
2009680 SEZ Bearing housing unit for sp203 chuck drive unit
2003151 SEZ Bearing housing unit for sp203 chuck drive unit
2008804 SEZ Bellow Valve, 4V-P4K
2008802 SEZ Bellow Valve, 4V-P4N
2008803 SEZ Bellow Valve, 4V1-P4N
2008800 SEZ Bellow Valve, 8V-P8K-11AC
2016122 SEZ Bellow Valve, 8V1-pt8k
2008804 SEZ Bellow Valve, 955AOP veriflo version
2000697 SEZ BELLOW VITON FOR GT24, LONG VERSION
2025218 SEZ Bellows Valve 8V1-P8K
2017845 SEZ BELLOWS VALVE 1/2" VS I, NC, KEL-F TIP
2008801 SEZ BELLOWS VALVE 1/2" VS I, NEEDLE TIP
2008801 SEZ Bellows Valve 1/2” VS I, Needle Tip
SEZ Belt tensioner, lower link arm, PRI equipe ATM-407 robot
2007648 SEZ BELT TIMING 10T5-550XY ultra durable
SEZ Bernoull N2 control solenoid valve
SEZ Bernoulli End Effector Assembly, 5" (125mm) wafer, customized Korea
SEZ Bernoulli end effector assembly, 6" 150mm wafer
2013031-01 SEZ Bernoulli End Effector Assembly, 6"/8"
SEZ Bernoulli end effector guide pins, 3mm protrusion, 1 set (front pins x2 set, back pins x2 set), enhanced durability PEEK material, for 200mm wafers handling
SEZ Bernoulli end effector OEM style PEEK guide pins, per set (1 set = 2X front 2019395 , 2X back 2019394), for 200mm wafer handling
2012996 SEZ Bernoulli end effector optical sensor amplifier FS-V1
SEZ Bernoulli end effector retainer guide, PEEK, 1 set = 4 pcs for 5"/6" model, for 150.1mm enlarged wafers
SEZ Bernoulli end effector retainer guide, PEEK, 1 set = 4 pcs for 8" model, for 200mm wafers, PRO-Q/SkySilicon
SEZ Bernoulli end effector retainer guide, vespel sp-1 (3X longer lifetime than PEEK), 1 set = 4 pcs for 5"/6" model, for 150.1mm enlarged wafers
SEZ Bernoulli end effector retainer guide, vespel sp-1 (3X longer lifetime than PEEK), 1 set = 4 pcs for 8" model, for 200mm wafers, PRO-Q/SkySilicon
2019395 SEZ Bernoulli end effector, Retaining pin front L=6mm
2019394 SEZ Bernoulli end effector, Retaining pin rear L=10mm
2003028 SEZ BLO BRAKE RST-150-40-14(9SEZ1330
2003019 SEZ Block brake (original), base block brake with brake assembly
2202707 SEZ Block brake assembly left, including brake rod and cylinder pre-assembled
2202686 SEZ Block brake assembly right, including brake rod and cylinder pre-assembled
2003727 SEZ Block Brake type I (old design)
2003727-01 SEZ Block Brake type II (new style)
2306044 SEZ Board, D-Side
2306045 SEZ Board, U-Side,
2325616-01 SEZ Bracket 1, buffer station 12'
2325617-01 SEZ Bracket 2, buffer station 12'
2325607-01 SEZ Bracket, unloading device
2200705 SEZ Brake Bar(version 3)
SEZ Brake resistor, chuck motor yaskawa sigma-5 motion axis
SEZ Brooks P/N 2002-0082, Assy, PCB, Arm Limit Switch, SPC, M1, SL
SEZ Brooks P/N 2073-0456, Scanner Cable 30" 10 pin Rev. A
1010-3937 SEZ Brooks robot ATM407 & other models motor, "R-axis" or "T-axis" motor
1010-3940 SEZ Brooks robot ATM407 & other models motor, "R-axis" or "T-axis" motor
1010-3937 SEZ brooks robot ATM407 & other models motor, "Z-axis" motor for ATM-400/500 MINERTIARM series R02MAKOEUTOPI200SE
2310251 SEZ Cable encoder AES-JZSP-CSP01-05 YASKAWA 5m
2015263 SEZ Cable Motor Mok 53 (2.5M)
2017068 SEZ Cable Motor Mok 53 (3M)
2015264 SEZ Cable Resolver REK 53/03(Chuck Speed) (3m)
2015265 SEZ Cable Resolver REK 53/03(Chuck Speed)(2.5M)
2325274 SEZ CABLE SENS 5P 2M PSE30X ZS-28-A
2000625 SEZ Cable, fiberoptic duplex, CDS to MU signal
SEZ Cables A, Yaskawa Sigma-5 for 750W chuck motor
SEZ Cables B, Yaskawa Sigma-5 for 750W chuck motor
SEZ Cables C, Yaskawa Sigma-5 for 750W chuck motor
2203924 SEZ Cam pin, 4200 medium arm selection, front
2011284 SEZ CAN 2-CHANNEL ANALOG INPUT TERMINALS 0-10V DC (AE750-
2010949 SEZ CAN 4-CHANEL DIGITAL INPUT TERMINALS 24V DC 0,2ms (AE750-403-ES80)
2011912 SEZ CAN automation controller CP470
2010947 SEZ CAN BUS COUPLER CAN-OPEN (AE750-307-ES77)
2012918 SEZ CAN INTERFACE PCI PORT CAN-PCI/331
2011358 SEZ CAN INTERFACE PORT CAN-ISA/331
2010946 SEZ CAN ISA card 203, CAN PC PLUG-IN CARD IPC-I320 CH40-10-20-0
2028236 SEZ Capacitive Proximity Swith
2311513 SEZ Capacitive Sensor (Flip and ECO module)
2013674 SEZ CAPACITIVE SENSOR AMPLIFIER 04001
2303142 SEZ Capacitive sensor KG5043SP4m
2001129 SEZ Capacitive sensor teflon, chuck reference position
2026958 SEZ Card bus interface N-400 Key
2001578 SEZ CARD,CONTROLLER,MOTION , EZI
2018625 SEZ Cassette centering 8” - rear, left
2018624 SEZ Cassette centering 8” - rear, right
2003183 SEZ Cassette centering, front
2003188 SEZ Cassette stop front
SEZ CDS DI water gun assembly, PFA, with spiral tubing recirculation
2008153 SEZ CDS GAUGE PROTECTOR IGP-02
SEZ CDS lighting unit, entire unit A-FR11/24, 24V DC 11W, 20.5-32V, 0.5A
2015163 SEZ CDS pump solenoid valve, SY5160-5MOU-C8(MONOS)
2000935 SEZ CDS Valve 201-37
2004381 SEZ CDS Valve 202-66
2004382 SEZ CDS Valve 202-67
2004382 SEZ CDS Valve 202-67
2013986 SEZ CDS VJ valve, 3-way pneumatic valve 1/2" D8-3C
2020705 ( SEZ CDS/Main unit SIGMAMELTEC Pressure Differential Switch for monitoring Exhaust
2013555 SEZ CDS/Main unit SIGMAMELTEC Pressure Differential Switch for monitoring Exhaust
2020705 SEZ CDS/Main unit SIGMAMELTEC Pressure Differential Switch, brand new replacement compatible model
2013555 SEZ CDS/Main unit SIGMAMELTEC Pressure Differential Switch, brand new replacement compatible model
2008580 SEZ CE-ATM 407B to ESC-200 Robot cable
2200874 SEZ CE-ATM 407B-1 / 2 ROBOT WITH 2X7.2" LINK ARMS (UP TO 300MM WAFER)
2013734 SEZ CE-ATM 407B-1 / 2 ROBOT WITH 2X7.2" LINK ARMS (UP TO 300MM WAFER)
2007572 SEZ CE-ATM 407B-1 / 2 ROBOT WITH 2X7.2" LINK ARMS (UP TO 300MM WAFER)
2027411 SEZ Cenetring pin
2013729 + 2013730 SEZ CENTERING PIN end effector double sided
2008628 SEZ CENTERING PIN end effector single sided
2013729 SEZ Centering pin for FLIP End-Effectors
2022434 SEZ Ceramic End Effector (1-Sided) non-smif / shutter door machine, 6"/8"/12"
2030402 SEZ Ceramic End Effector (1-Sided) non-smif / shutter door machine, 6"/8"/12"
2010703 SEZ Ceramic End Effector (1-Sided) non-smif / shutter door machine, 6"/8"/12"